info@omscientific.com

Omscientific is a representative of Semicore in India.


Substrate Holders: Heated, cooled or biased, rotating substrate holder

Ion Source: Substrate pre-cleaning assisted deposition, nanometer-scale modification of surfaces.


Tri-Axissm Depostion Techniques: Magnetron Sputtering RF, DC, or Pulsed-DC. Electron Beam Evaporation, Thermal Evaporation, Organic Evaporation for OLED/ PLED and Organic Electronics. Glancing Angle Depostion (GLAD)Cathodic Arc Plasma Deposition, Pulsed Laser Deposition (PLD)

TriAxis Features & Options:


Vacuum Chamber: 304 stainless steel cylindrical chamber, typical size range 18 or 24 inch diameter – scaled to match the specific application.


Pumping: Turbomolecular or cryogenic


Load Lock: Manual or automatic transfer, high vacuum pumping. Accommodates small samples of various shapes and sized or a single substrate up to 200 mm diameter.


Process Control: PC / PLC based process automation with graphic user interface, recipe control, data logging and remote e-support.


In-Situ Monitoring & Control: Quartz crystal monitoring, optical monitoring, residual gas analyzer and other in-situ measurement and process control.


Substrate Fixture: Single, multiple, planetary or custom substrate fixtures

TriAxis - Multi Source Evaporation System