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Omscientific is a representative of Suss Microtec in India.

RC12


Universal Coating System for Wafers up to 300mm

The RC12 is the ideal platform for manual and semi-automated spin coating processes in R&D and low-volume fabrication. Substrates up to 300mm in diameter and square substrates up to 9" edge length can be processed.

SUSS MicroTec RC12 offers GYRSET® closed cover coating technology. Open bowl coating is possible with programmable z-height for defined distance between the substrate and cover. The GYRSET® closed cover coating technology offers enhanced uniformity and significant cost savings of up to 60 percent, depending on resist chemistry.