ALD MBE MOCVD PECVD Sputtering Ion Beam deposition e beam evaporation
Plasma etch systems Ion Beam Milling Chemical Wet bench
Wafer bonder Device bonder / flip-chip bonder Wafer scriber / breaker
Manometric Analyzer Gravimetric Analyzer Sorption microbalance for extreme enivironments Vapor sorption Analyzer Sorption in controlled climate
Filtration and gas seperation process
Gas & Vapor Sorption
Packaging
Etch
Growth & Deposition
Mask Aligner Photomask processing equipment Nanoimprint Spin coater, Spray coater and Developer Meteorology Projection scanner Laser processing
Lithography cluster Wet processing system High quality micro optics Remanufactured equipment
Lithography