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Optimized for the production of nanostructures, the Nano imPrinting Stepper NPS300 is the first ever tool able to combine aligned Hot Embossing and UV-NILon a same platform. The NPS300 is able to print sub-20 nm geometries with an overlay accuracy of 250 nm.

The NPS300 demonstrates proven cutting-edge technology solutions that meet the economic requirements both for R&D and production.

Its flexible architecture offers an excellent process reproducibility and a unique ability to pattern large areas, in a sequential step and repeat mode on wafers up to 300 mm.

The NPS300 is available either as manually loaded or as a fully automated system with wafer loading capability.

NPS300 Nano imPrinting Stepper

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