Omscientific is a representative of Semicore in India.
Substrate Fixture: Single, multiple, planetary or custom substrate fixtures.
Substrate Holders: Heated, cooled or biased, rotating substrate holder.
Ion Source: Substrate pre-cleaning assisted deposition, nanometer-scale modification of surfaces.
CAPOSSM Deposition Techniques: Magnetron Sputtering RF, DC, or Pulsed-DC. Electron Beam Evaporation,
Thermal Evaporation, Organic Evaporation for OLED/PLED and Organic Electronics. Glancing Angle
Deposition (GLAD) Cathodic Arc Plasma Deposition, Pulsed Laser Deposition (PLD).
CAPOS Features & Options:
Vacuum Chamber: 304 stainless steel box chamber, typical size range 18 or 24 inch square – scaled to match the specific application.
Pumping: Turbomolecular or cryogenic.
Load Lock: Manual or automatic transfer, high vacuum pumping. Accommodates various shapes and sized substrates.
Glove Box: Standard or custom designed.
Process Control: PC/PLC based process automation
with graphic user interface, recipe control, data logging
and remote e-support.
In-Situ Monitoring & Control: Quartz crystal monitoring, optical monitoring, residual gas analyzer and other
in-situ measurement and process control.
CAPOS - Combination Sputtering / Evaporation System