Omscientific is a representative of Semicore in India.

Substrate Fixture: Single, multiple, planetary or custom substrate fixtures.


Substrate Holders: Heated, cooled or biased, rotating substrate holder.


Ion Source: Substrate pre-cleaning assisted deposition, nanometer-scale modification of surfaces.


CAPOSSM Deposition Techniques: Magnetron Sputtering RF, DC, or Pulsed-DC. Electron Beam Evaporation,
Thermal Evaporation, Organic Evaporation for OLED/PLED and Organic Electronics. Glancing Angle
Deposition (GLAD) Cathodic Arc Plasma Deposition, Pulsed Laser Deposition (PLD).

CAPOS Features & Options:


Vacuum Chamber: 304 stainless steel box chamber, typical size range 18 or 24 inch square – scaled to match the specific application.


Pumping: Turbomolecular or cryogenic.


Load Lock: Manual or automatic transfer, high vacuum pumping. Accommodates various shapes and sized substrates.


Glove Box: Standard or custom designed.


Process Control: PC/PLC based process automation
with graphic user interface, recipe control, data logging
and remote e-support.


In-Situ Monitoring & Control: Quartz crystal monitoring, optical monitoring, residual gas analyzer and other
in-situ measurement and process control.

CAPOS - Combination Sputtering / Evaporation System

info@omscientific.com